NaMiFAB is Ghent University’s cleanroom facility, offering advanced infrastructure for nano- and microfabrication.
It combines the expertise and equipment of three leading research groups – Photonics Research Group (PRG), Centre for Microsystems Technology (CMST), and Liquid Crystals and Photonics Group (LCP) – making more than 100 specialized tools available to researchers and industry partners.
Operating in a 1000 m² ISO-classified cleanroom (ISO5–ISO8), NaMiFAB offers a broad range of processes, including electron-beam and optical lithography, plasma etching (RIE, ICP, DRIE), wet etching, thin-film deposition (PECVD, ICPECVD, ALD, PVD), micro-transfer printing, multi-photon 3D printing of micro-optical elements, laser micromachining, advanced packaging and assembly, and high-resolution inspection and characterization.
The facility enables cutting-edge research in photonics, nanoelectronics, sensors, biomedical devices, semiconductor packaging, heterogeneous integration, quantum technologies, and materials science. It fosters collaboration and accelerates technology transfer through prototyping services and process development.